With over the diaphragm. Kulwant et al. proposed

With
the advent of MEMS and NEMS technology the wide popularization in the field of graphene
had occurred that shows a remarkable hike in smart sensor, may be called as
graphene sensor.It was estimated that at 2021 approximately $19.28
billion revenue can be generated by MEMS sensor, out of which pressure sensor
has a remarkable impact of approximately 15.5% of the total revenue generator (Frost
Perspectives, Opportunity Analysis for MEMS Sensors, Sep 23, 2016). Tao, L. Q et al. Proposed a graphene pressure sensor
having high sensitivity at large working range of 0-20kPa for detecting the
human motions such as wrist pulse detection, movements monitoring and voice recognition
1.There are two considerable terms in using graphene is sensitivity and large
strain sustainability 2-4. Many research have been done owing to optimize these
two terms keeping in lieu to maintain the stretch ability of the sensor2.Taking
about designing and fabrication of strain sensor. Basically silicon is used as
a substrate material which is called as diaphragm which is very important part
of the pressure sensor. To increase the sensitivity poly silicon is generally
used as a sensing material over the diaphragm. Kulwant et al. proposed a
non-conventional electron beam physical vapour deposition (EBPVD) method was
followed for depositing poly-crystalline thin film to realize the piezo-resistors
as sensing elements over the square diaphragm 5 to optimize the sensitivity
of the sensor. Various advancements in the field of controllable synthesis of
graphene using exfoliation of graphene by mechanical, chemical and thermal
reduction and chemical vapour deposition are also done to make a sensitive sensor
6. In this proposal we are replacing poly silicon by graphene owing to its
exceptional electronic and mechanical properties 7.The base of this proposal wholly depends
on graphene- the magic material which is proven by usage of graphene strain
sensors-a magic sensor having lots of properties such as low cost, ultra high
sensitivity, large strain range, miniature assembly, flexibility. Due to Outstanding
properties, graphene has involved remarkable consideration in many research
fields. The major constraint that defines the state of art for this proposal
lies under the optimization of three parameters that are   Designing, Fabrication and sensitivity.
Designing includes the optimization of the size of the sensor so that it can be
utilized in various bio medical field. Rahman,
S. A et al also proposed a pressure sensor having miniature size so that it can
be easily inserted into the Catherator and can be easily inserted into the
human body without any inflammation and infection 9. Fabrication process includes cavity
formation and process for constructing the measuring configuration over the
diaphragm. And lastly Optimization of the device in terms of sensitivity which
is tested by using COMSOL Multiphysics software9.Suitable packaging module
has been presented for sensor performance testing in terms of linearity,
hysteresis, and repeatability in batch fabrication process.

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